Vacuum technology. Vacuum gauges. Specifications, calibration and measurement uncertainties for spinning rotor gauges
Vacuum technology. Vacuum gauges. Specifications, calibration and measurement uncertainties for spinning rotor gauges
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Vacuum technology. Vacuum gauges. Specifications, calibration and measurement uncertainties for spinning rotor gauges

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1   Scope

This document defines terms related to spinning rotor gauges (SRGs)[2]-[4], specifies required parameters for SRGs, details the SRG calibration procedure and describes which measurement uncertainties to consider when operating these gauges. This document is applicable to pressure up to 2 Pa.