1 Scope
This document describes a special design of an ionisation vacuum gauge which has a
well-defined ionising electron path length.[2] Due to the construction design, it leads to good measurement accuracy, long-term
stability, as well as gauge independent and reproducible sensitivity for nitrogen
and relative sensitivity factors[3][4]. It is designed for the measurement range of 10-6 Pa to 10-2 Pa.
This document describes only those dimensions and potentials of the gauge head which
are relevant for the electron and ion trajectories. This document does not describe
the electrical components necessary to operate the ionisation vacuum gauge in detail.
The gauge head can be operated by voltage and power sources and ammeters commercially
available, but also by a controller specially built for the purpose of the operation
of this gauge head.
The ionisation vacuum gauge described in this document can be built by any experienced
manufacturer of other ionisation vacuum gauges. It is not subject to intellectual
property protection.
It is assumed for this document that the applicant is familiar with both the physics
and principles of ionisation vacuum gauges as well as high and ultra-high vacuum technology
in general.