What is ISO 18114 about?
ISO 18114 specifies a method of determining relative sensitivity factors (RSFs) for secondary-ion mass spectrometry (SIMS) from ion-implanted reference materials.
ISO 18114 provides the method that is applicable to specimens in which the matrix is of uniform chemical composition, and in which the peak concentration of the implanted species does not exceed one atomic percent.
Who is ISO 18114 for?
ISO 18114 on secondary-ion mass spectrometry — determination of relative sensitivity factors is applicable for:
- Semi-conductor manufacturers
- Metals manufactures
- Quality control laboratories
Why should you use ISO 18114?
An isotopic relative sensitivity factor (RSF) for a particular element-matrix combination is derived from a SIMS depth profile of an ion-implanted external standard. This RSF can then be used to quantify the concentration of the same element as a function of depth in a different sample of the same matrix material.
Ion-implanted materials are commonly used in secondary-ion mass spectrometry for the calibration of instruments. ISO 18114 was prepared to provide a uniform method for determining the relative sensitivity factor of an element in a specified matrix from ion-implanted reference material and to show how the concentration of the element in a different sample of the same matrix material be determined.