1 Scope
This International Standard specifies a method for calibrating the kinetic energy
scales of Auger electron spectrometers with an uncertainty of 3 eV, for general analytical
use in identifying elements at surfaces. In addition, it specifies a method for establishing
a calibration schedule. It is applicable to instruments used in either direct or differential
mode, where the resolution is less than or equal to 0,5 % and the modulation amplitude
for the differential mode, if used, is 2 eV peak-to-peak. It is applicable to those
spectrometers equipped with an inert gas ion gun or other method for sample cleaning
and with an electron gun capable of operating at 4 keV or higher beam energy.