Surface chemical analysis. Glow discharge Mass spectrometry (GD-MS). Introduction to use

DD ISO/TS 15338:2009 Surface chemical analysis. Glow discharge Mass spectrometry (GD-MS). Introduction to use

DD ISO/TS 15338 is a Technical Specification which gives guidelines for the operation of glow discharge mass spectrometry (GD-MS) instruments and recommendations for the use of GD-MS. It is intended to be read in conjunction with the instrument manufacturers’ manuals and recommendations.

Contents of DD ISO/TS 15338:

Foreword

1 Scope

2 Normative references

3 Terms and definitions

4 Safety

4.1 Use of high-voltage power supply and connection of the instrument

4.2 Use and storage of compressed-gas cylinders

4.3 Handling of cryogenic materials

5 Principle

6 Materials

7 Apparatus

7.1 Ion source

7.2 Mass analyser

7.3 Detector system

7.4 Vacuum system

7.5 Data acquisition and control

8 Samples and sample preparation

8.1 General

8.2 Sample type

8.3 Sample geometry

8.4 Sample preparation for bulk analysis

8.5 Sample preparation for depth profiling

9 Measurement procedures

9.1 System precautions

9.2 Selection of discharge parameters and isotopes

9.3 Presputtering

9.4 Optimizing the ion current

9.5 Analytical set-up

9.6 Data analysis

9.7 Depth profile analysis

9.8 Instrument performance

9.9 Analysis

10 Test report

Bibliography