1 Scope
The purpose of this International Standard is to define how peak fitting and the results of peak fitting in X-ray photoelectron spectroscopy shall be reported. It is applicable to the fitting
of a single spectrum or to a set of related spectra, as might be acquired, for example,
during a depth profile measurement. This International Standard provides a list of
those parameters which shall be reported if either reproducible peak fitting is to be achieved or a number of spectra are to be fitted and the fitted spectra
compared. This International Standard does not provide instructions for peak fitting nor the procedures which should be adopted.