Surface chemical analysis. Electron spectroscopies. Minimum reporting requirements for peak fitting in X-ray photoelectron spectroscopy

Surface chemical analysis. Electron spectroscopies. Minimum reporting requirements for peak fitting in X-ray photoelectron spectroscopy

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1   Scope

The purpose of this International Standard is to define how peak fitting and the results of peak fitting in X-ray photoelectron spectroscopy shall be reported. It is applicable to the fitting of a single spectrum or to a set of related spectra, as might be acquired, for example, during a depth profile measurement. This International Standard provides a list of those parameters which shall be reported if either reproducible peak fitting is to be achieved or a number of spectra are to be fitted and the fitted spectra compared. This International Standard does not provide instructions for peak fitting nor the procedures which should be adopted.