Surface chemical analysis. Atomic force microscopy. Guideline for restoration procedure for atomic force microscopy images dilated by finite probe size

Surface chemical analysis. Atomic force microscopy. Guideline for restoration procedure for atomic force microscopy images dilated by finite probe size

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1   Scope

This document describes a procedure for the quantitative characterization of the probetip of an atomic force microscope (AFM) probe and a restoration of AFM topography images dilated by finite probe size. The three-dimensional shape of the probe apex is extracted by image reconstruction using suitable reference materials. This document is applicable to the reconstruction of AFM topography images of solid material surfaces.