Semiconductor devices - Semiconductor bio sensors. Test method and data analysis for calibration of lens-free CMOS photonic array sensors

Semiconductor devices - Semiconductor bio sensors. Test method and data analysis for calibration of lens-free CMOS photonic array sensors

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1   Scope

This part of IEC 60747 specifies the test methods and data analysis for the calibration of lens - free CMOS photonic array sensors. This document includes the test conditions of each process, configuration of lens-free CMOS photonic array sensors, statistical analysis of test data, calibration for planarization and linearity, and test reports.