1 Scope
This part of IEC 62047 describes test method for bonding strength between poly dimethyl siloxane (PDMS) and glass. Silicone-based rubber, PDMS, is used for building of chip-based microfluidic devices fabricated using lithography
and replica moulding processes. The problem of bonding strength is mainly for high
pressure applications as in the case of certain peristaltic pump designs where an
off chip compressed air supply is used to drive the fluids in micro channels created
by a twin layer, one formed by bondage between glass with replica moulded PDMS and another between PDMS and PDMS. Also, in case of systems having pneumatic microvalves, a relatively high level of
bonding particularly between two replica moulded layers of PDMS becomes quite necessary. Usually there is a leakage and debonding phenomena between
interface of bonded areas, which causes unstability and shortage of lifetime for MEMS
devices. This standard specifies general procedures on bonding test of PDMS and glass chip.