Semiconductor devices. Micro-electromechanical devices - Test method for the nonlinear vibration of MEMS resonators

Semiconductor devices. Micro-electromechanical devices - Test method for the nonlinear vibration of MEMS resonators

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What is BS IEC 6204732 - MEMS resonator testing about?  

MEMS resonators are small electromechanical structures that vibrate at high frequencies. They are used for timing references, signal filtering, mass sensing, biological sensing, motion sensing, and other diverse applications. 

BS IEC 6204732 is part of the IEC 62047 series on semiconductor devices. BS IEC 6204732 specifies the test method and test condition for the nonlinear vibration of MEMS resonators. The statements made in BS IEC 6204732 apply to the development and manufacture for MEMS resonators. 

Who is BS IEC 6204732 - - MEMS resonator testing for? 

BS IEC 6204732 on MEMS resonators testing is useful for: 

  • Manufacturers of microelectromechanical devices 
  • Semiconductor foundries 
  • Manufacturers of automotive parts 
  • Electronic engineers 
  • Product design engineers / innovation teams 
  • Quality control personnel 

Why should you use BS IEC 6204732 - MEMS resonator testing? 

BS IEC 6204732 guidelines help you with the testing the MEMS resonators that you design and manufacture. BS IEC 6204732 specifies the test method and test procedures for nonlinear vibration of MEMS resonators for: 

  • The amplitude-frequency response and phase-frequency response of the nonlinear vibration 
  • The bending factor of the nonlinear vibrating frequency response 
  • The amplitude threshold for the nonlinear jump 
  • The frequency deviation as a result of the nonlinear vibration 

BS IEC 6204732 guidelines are a step towards ensuring that your customers have access to high-quality MEMS resonators.