Semiconductor devices. Micro-electromechanical devices - Test method for Poisson's ratio of thin film MEMS materials

Semiconductor devices. Micro-electromechanical devices - Test method for Poisson's ratio of thin film MEMS materials

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What is BS EN 62047-21 - Poisson's ratio of thin-film MEMS materials about?  

BS EN 62047-21 is the 21st part of an international standard used for semiconductor devices.  

BS EN 62047-21 specifies the determination of Poisson's ratio from the test results obtained by the application of uniaxial and biaxial loads to thin-film micro-electromechanical systems (MEMS) materials with lengths and widths less than 10 mm and thicknesses less than 10 μm. 

Who is BS EN 62047-21 - Poisson's ratio of thin-film MEMS materials for? 

BS EN 62047-21 on Semiconductor devices is useful for: 

  • Manufacturers of semiconductor devices 
  • Manufacturers of electronic devices 
  • Manufacturers of automotive parts 
  • Electronic engineers 
  • Semiconductor foundries 
  • Quality control executives 

Why should you use BS EN 62047-21 - Poisson's ratio of thin-film MEMS materials 

Micro-electromechanical system (MEMS) is a process technology that is useful in creating tiny integrated devices or systems.  These devices are useful in combining mechanical and electrical components. 

BS EN 62047-21 specifies the test methods, test apparatus, and test procedure for Poisson’s ratio of thin film MEMS materials. This test method is useful in measuring the Poisson ratio by applying air pressure to the test piece. With the help of BS EN 62047-21, you can also measure the deflections of both membranes used in MSME devices.  

By applying BS EN 62047-21 you can endure the quality of thin-film MEMS material used in these devices that results in manufacturing better quality micro-electromechanical devices.