What is BS EN 62047-2 — Micro-electromechanical devices about?
BS EN 62047-2 is the second part of the multi-series standard that focuses on aspects of semiconductor devices.
BS EN 62047-2 specifies the tensile testing method of thin-film materials used in micro-electromechanical devices. It gives method for tensile testing of thin film materials with length and width under 1 mm and thickness under 10 mm, which are the main structural materials for micro-electromechanical systems (MEMS), micromachines and similar devices.
The main structural materials for MEMS, micromachines and similar devices have specific features such as typical dimensions in the order of a few microns, a material fabrication by deposition, and a test piece fabrication by non-mechanical machining using etching and photolithography.
Who is BS EN 62047-2 — Micro-electromechanical devices for?
BS EN 62047-2 on Micro-electromechanical devices, is useful for:
- Manufacturers of semiconductor devices
- Manufacturers of micro-electromechanical devices
- Test providers of semiconductor devices
- Quality control personnel
- Electrical engineers
- Semiconductor foundries
Why should you use BS EN 62047-2 — Micro-electromechanical devices?
Micro-electromechanical systems (MEMS) are a process technology that is useful in creating tiny integrated devices or systems. These devices are useful in combining mechanical and electrical components.
BS EN 62047-2 specifies the testing methodology and procedure which enables users to check the compliance of the specific features according to global standards. This helps them in determining the tensile strength of thin-film materials used in micro-electromechanical devices.
BS EN 62047-2 gives you detailed information about the testing methods and test apparatus needed to perform the test, which helps the users to estimate the speed of testing, elongation measurement, stress-strain curve, etc. for understanding the tensile strength of the thin film.
By applying BS EN 62047-2, you can manufacture excellent quality micro-electromechanical devices used in MEM systems (MEMS).