Semiconductor devices. Micro-electromechanical devices - Performance testing method of vibration-driven MEMS electret energy harvesting devices

Semiconductor devices. Micro-electromechanical devices - Performance testing method of vibration-driven MEMS electret energy harvesting devices

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What is BS IEC 6204728 - Vibration-driven MEMS for energy harvesting devices?  

BS IEC 62047 is an international standard that discusses semiconductor devices including microelectromechanical devices. The main aim of the IEC 62047 series is to provide entities involved with semiconductor technology with best industry techniques to demonstrate the reliability and performance of their devices and components. 

BS IEC 6204728 is the 28th part of the multi-series that discusses semiconductor devices which performance testing method of vibration-driven MEMS electret energy harvesting.  

BS IEC 6204728 specifies terms and definitions, and a performance testing method of vibration-driven MEMS electret energy harvesting devices to determine the characteristic parameters for consumer, industry, or any application. 

BS IEC 6204728 applies to vibration-driven electret energy harvesting devices whose electrodes with a gap below 1 000 μm are covered by dielectric material with trapped charges and are fabricated by MEMS processes such as etching, photolithography, or deposition. 

Who is BS IEC 6204728 - Vibration-driven MEMS for energy harvesting devices for? 

BS IEC 6204728on semiconductor devices is useful for:  

  • Manufacturers of MEMS devices 
  • Semiconductor and microelectromechanical device manufacturers 
  • Manufacturers of electronic equipment and components 
  • Semiconductor technology industry 
  • Automotive industry 
  • Medical device industry 
  • Product design engineers 
  • Electronics and mechanical engineers   
  • Quality control and testing agencies  

Why should you use BS IEC 6204728 - Vibration-driven MEMS for energy harvesting devices?  

Electret-based microelectromechanical system (MEMS) vibratory energy harvesting is a key technology for converting the mechanical energy of environmental vibrations into electricity. If their potential is realised, the need of batteries to power components can be done away with.  

BS IEC 6204728 provides guidance on vibration testing equipment that provides fundamental configurations consisting of functional blocks or components for vibration testing equipment for MEMS electrets energy harvesting devices at a specified constant frequency and constant acceleration. Guidance on measuring vibration acceleration response, vibration frequency response and the conditions and electric characteristics of the external load are also covered in BS IEC 6204728.  

The vibration-driven MEMS energy harvesting devices for testing defined in BS IEC 62047-28 indicates the manner of mounting and vibration direction.  

As a result, you can efficiently retrieve the power from vibrations by BS IEC 62047-28-compliant MEMS energy harvesters.