Semiconductor devices. Micro-electromechanical devices - Measurement methods of electro-mechanical conversion characteristics of MEMS piezoelectric thin film

Semiconductor devices. Micro-electromechanical devices - Measurement methods of electro-mechanical conversion characteristics of MEMS piezoelectric thin film

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What is BS IEC 6204730 - MEMS piezoelectric thin film about?  

BS IEC 62047 is an international standard that discusses semiconductor devices including microelectromechanical devices. The main aim of the IEC 62047 series is to provide entities involved with semiconductor technology with best industry techniques to demonstrate the reliability and performance of their devices and components. 

BS IEC 6204730 is the 30th part of the series that specifies measuring methods of electro-mechanical conversion characteristics of piezoelectric thin film used for microsensors and micro actuators, and its reporting schema to determine the characteristic parameters for consumers, industry, or any other applications of piezoelectric devices.  

BS IEC 6204730 applies to piezoelectric thin films fabricated by the MEMS process. 

Who is BS IEC 6204730 - MEMS piezoelectric thin film for? 

BS IEC 6204730on semiconductor devices is useful for:  

  • Semiconductor and microelectromechanical device manufacturers 
  • Manufacturers of electronic equipment and components 
  • Manufacturers of piezoelectric devices 
  • Semiconductor technology industry 
  • Automotive industry 
  • Product design engineers 
  • Electronics and mechanical engineers   
  • Quality control and testing agencies  

Why should you use BS IEC 6204730 - MEMS piezoelectric thin film?  

Micro-electromechanical systems (MEMS) is a technology useful in creating integrated devices or systems that are combined with mechanical and electrical properties. 

BS IEC 6204730 provides fundamental configurations consisting of functional blocks or components for testbed of direct and converse transverse piezoelectric coefficient of MEMS piezoelectric thin film. 

The piezoelectric thin films manufactured in accordance to BS IEC 62047-30 can thus offers the large linear forces with fast actuation at small drive voltages. As a consequence, features of high energy density, wide displacement, reduced voltage burden and low power consumption for MEMS, can be achieved.