What is BS EN 60204-33 - Safety requirements for semiconductor fabrication equipment about?
BS EN 60204-33 is the 33rd part of the BS EN 60204 multi-series that discusses the safety of machinery.
BS EN 60204-33 applies to electrical and electronic equipment associated with semiconductor fabrication equipment for the manufacture, measurement, assembly, and test of semiconductors.
The electrical equipment covered by BS EN 60204-33 commences at the point of connection of the supply to the electrical equipment (see 5.1), and includes proper instruction for its safe installation.
BS EN 60204-33 is applicable to the electrical equipment or parts of the electrical equipment that operate with nominal supply voltages not exceeding 1 000 V for alternating current (a.c.) and not exceeding 1 500 V for direct current (d.c.), and with nominal supply frequencies not exceeding 200 Hz. For higher voltages or frequencies, special requirements may be needed.
Included are requirements for protective measures against electrical safety hazards as well as electrical interlock circuits that protect against non-electrical hazards.
However, BS EN 60204-33 does not cover all the requirements that are needed or required by other standards or regulations in order to safeguard persons from hazards other than electrical hazards (e.g., chemical hazards, mechanical hazards, radiation hazards). Each type of machine has unique requirements to be accommodated to provide adequate safety.
Additional and special requirements can apply to the electrical equipment of fabrication equipment that:
- Use, process, or produce potentially explosive material
- Are used in potentially explosive and/or flammable atmospheres
- Have special risks when producing or using certain materials
- Are hoisting machines (which are covered by IEC 60204-32)
Note1: BS EN 60204-33 does not include specifications for performance or functional characteristics of the fabrication equipment.
Note2: BS EN 60204-33 does not deal with the possible effects on human health that can result from emissions (for example EMFs, noise) from the fabrication equipment.
Note3: BS EN 60204-33 does not specify requirements for electromagnetic compatibility (EMC).
Who is BS EN 60204-33 - Safety requirements for semiconductor fabrication equipment for?
BS EN 60204-33 on safety requirements for semiconductor fabrication equipment is useful for:
- Semiconductor foundries
- Manufacturers of fabrication equipment
- Quality control personnel
- Testing and inspection personnel
Why should you use BS EN 60204-33 - Safety requirements for semiconductor fabrication equipment?
Semiconductor fabrication equipment is prone to hazards and hazardous situations due to mechanical failure, mishandling or poor design quality. These hazards compromise the safety of the end-users and thereby raise concern over the quality of the final product.
BS EN 60204-33 has been created to reflect the unique needs of electrical safety within the semiconductor manufacturing environment. This includes the specialized clean room environment in which semiconductors are fabricated as well as the specialized nature of the semiconductor fabrication equipment itself.
BS EN 60204-33 ensures a level of safety consistent with IEC 60204-1 while still permitting the flexibility needed in the design and operation of semiconductor fabrication equipment.
Overall, BS EN 60204-33 guidelines help you to produce semiconductor fabrication equipment that meets the electrical safety needs of the semiconductor industry.