1 Scope
This document specifies methods of determining nanoparticle size and shape distributions by acquiring and evaluating scanning electron microscope images and by obtaining and reporting accurate results.
NOTE 1 This document applies to particles with a lower size limit that depends on the required uncertainty and on the suitable performance of the SEM, which is to be proven first-according to the requirements described in this document.
NOTE 2 This document applies also to SEM-based size and shape measurements of larger than nanoscaleparticles.