Nanotechnologies. Description, measurement and dimensional quality parameters of artificial gratings

Nanotechnologies. Description, measurement and dimensional quality parameters of artificial gratings

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What is PD IEC/TS 62622 - Artificial gratings used in nanotechnology about?

PD IEC/TS 62622 is a technical report that discusses Nanotechnologies. PD IEC/TS 62622 outlines the generic terminology for the global and local quality parameters of artificial gratings, interpreted in terms of deviations from nominal positions of grating features to improve the quality and performance of artificial gratings.

PD IEC/TS 62622 supports quality assurance in th

e production and use of artificial gratings in different areas of application in nanotechnology. Whilst the definitions and described methods are universal to a large variety of different gratings, the focus is on one-dimensional (1D) and two-dimensional (2D) gratings under PD IEC/TS 62622.

Who is PD IEC/TS 62622 - Artificial gratings used in nanotechnology for?

PD IEC/TS 62622 on artificial gratings used in nanotechnology is useful for:

  • Manufacturers of artificial gratings for nanotechnologies
  • Test centres and calibration laboratories
  • Regulatory authorities

Why should you use PD IEC/TS 62622 - Artificial gratings used in nanotechnology?

Artificial gratings play an important role in the manufacturing processes of small structures at the nanoscale as well as the characterisation of nano-objects. The quality of the artificial gratings used for position feedback generally influences the achievable accuracy of alignment systems or positioning systems in manufacturing tools.

PD IEC/TS 62622 guideline assists you with grating calibration and quality characterization methods on global methods, local methods, hybrid methods, comparison of methods, other deviations of grating features, and filter algorithms for the grating quality characterization for description, measurement, and dimensional quality parameters for artificial gratings.

PD IEC/TS 62622 also guides on reporting grating characterization results for calibration procedures and grating quality parameters for artificial gratings.

With obedience and compliance to PD IEC/TS 62622, you can standardise the measurement and dimensional quality parameters of artificial gratings. Additionally, assists you with proper evaluation methods for calibration and characterization of artificial gratings.