1 Scope
This document, which is a Technical Report, is focused on the practical protocol of
ellipsometry to evaluate the thickness of nanoscale films. This document does not
include any specification of the ellipsometers, but suggests how to minimize the data
variation to improve data reproducibility.
This document includes
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– outlines of the ellipsometry procedures,
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– methods of interpretation of results and discussion of data analysis, and
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– case studies.