1 Scope

This part of 62876 establishes a standardized method to determine

• volume fraction

for graphene by

• ellipsometry.

Thickness/composition measurements are evaluated by ellipsometry before and after the stability test. By model calculation, the volume fraction of graphene can be evaluated. Since the test method is non-destructive, it can be used to assess the reliability and durability of graphene films on production lines.

• For graphene-capped copper for Cu interconnects in a semiconductor engineering, for example, the reliability and durability of the capping layer are evaluated.

• Gas sensors, gas barriers, transparent electrodes for solar cells, etc. are being researched and developed.

• This method is useful for non-destructive and quantitative evaluation of the volume fraction of graphene to assess the reliability and durability.