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Nanomanufacturing - Key control characteristics - Part 6-23: Graphene-related products - Sheet resistance, carrier density, carrier mobility: Hall bar method

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1 Scope

This part of IEC 62607 establishes a standardized method to determine the key control characteristic (KCC)

  • carrier mobility and sheet resistance

for graphene thin films by

  • Hall measurement.

The carrier mobility is derived by the product of the Hall coefficient and the electric conductivity and the sheet resistance is derived by the product of the longitudinal resistance and the aspect ratio of a Hall device.

  • The method is applicable for graphene thin film Hall devices with length and width greater than 100 micrometers.