Nanomanufacturing. Key control characteristics - Nano-enabled metal-oxide interfacial devices. Test method for defect states by thermally stimulated current

Nanomanufacturing. Key control characteristics - Nano-enabled metal-oxide interfacial devices. Test method for defect states by thermally stimulated current

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1   Scope

There are two types of thermally stimulated current (TSC) measurement methods, classified by the origin of the current. One is generated by the detrapping of charges. The other one is generated by depolarization. This part of IEC 62607 focuses on the former method, and specifies the measurement method to be developed for determining defect states of nano-enabled metal-oxide interfacial devices.
This document includes:
  • outlines of the experimental procedures used to measure TSC,
  • methods of interpretation of results and discussion of data analysis, and
  • case studies.