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Nanomanufacturing. Key control characteristics - Graphene-related products. Field-effect mobility for layers of two-dimensional materials: field-effect transistor method

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1 Scope

This part of IEC 62607 establishes a standardized method to determine the key control characteristic

  • field-effect mobility

for semiconducting two-dimensional (2D) materials by the

  • field-effect transistor (FET) method.

For two-dimensional semiconducting materials, the field-effect mobility is determined by fabricating a FET test structure and measuring the transconductance in a four-terminal configuration.

  • This method can be applied to layers of semiconducting two-dimensional materials, such as graphene, black phosphorus (BP), molybdenum disulfide (MoS2), molybdenum ditelluride (MoTe2), tungsten disulfide (WS2), and tungsten diselenide (WSe2).

  • The four-terminal configuration improves accuracy by eliminating parasitic effects from the probe contacts and cables