Microbeam analysis. Guidelines for orientation measurement using electron backscatter diffraction
Microbeam analysis. Guidelines for orientation measurement using electron backscatter diffraction
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Microbeam analysis. Guidelines for orientation measurement using electron backscatter diffraction

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1   Scope

This document gives guidance on how to generate reliable and reproducible crystallographic orientation measurements using electron backscatter diffraction (EBSD). It addresses the requirements for specimen preparation, instrument configuration, instrument calibration and data acquisition.