Geometrical product specifications (GPS). Surface texture: Areal - Design and characteristics of non-contact (point autofocus probe) instruments
Geometrical product specifications (GPS). Surface texture: Areal - Design and characteristics of non-contact (point autofocus probe) instruments
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Geometrical product specifications (GPS). Surface texture: Areal - Design and characteristics of non-contact (point autofocus probe) instruments

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1   Scope

This document specifies the design and metrological characteristics of point autofocus probe (PAP) instruments for the areal measurement of surface topography. Because surface profiles can be extracted from areal surface topography data, the methods described in this document are also applicable to profiling measurements.