Geometrical product specifications (GPS). Surface texture: Areal - Design and characteristics of non-contact (phase shifting interferometry) instruments
Geometrical product specifications (GPS). Surface texture: Areal - Design and characteristics of non-contact (phase shifting interferometry) instruments
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Geometrical product specifications (GPS). Surface texture: Areal - Design and characteristics of non-contact (phase shifting interferometry) instruments

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1   Scope

This document specifies the design and metrological characteristics of phase shifting interferometry (PSI) instruments for the areal measurement of surface topography. Because surface profiles can be extracted from areal surface topography data, the methods described in this document are also applicable to profiling measurements.