Fine ceramics (advanced ceramics, advanced technical ceramics). Test method for surface roughness of fine ceramic films by atomic force microscopy

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This document specifies a method to evaluate the adequateness of a probe tip for fine-ceramic thin-film surface roughness measurements by atomic force microscopy. This method applies to surfaces with an arithmetical mean roughness, R_a, in the range of about 1 nm to 30 nm and a mean width of roughness profile elements, R_sm, in the range of about 0,04 μm to 2,5 μm.