Automation systems and integration. Digital twin framework for manufacturing - Use case on management of semiconductor ingot growth process

Automation systems and integration. Digital twin framework for manufacturing - Use case on management of semiconductor ingot growth process

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1   Scope

This document describes a digital twin for monitoring and controlling the semiconductor ingot growth process. The use case is analysed and designed using the ISO 23247 series. The result is a systematic view of the use case implementation and a high-level design of the digital twins, which can be directly implemented using the readily available tools and languages, including those supported by the relevant standards.